Epitaxial growth of high-quality yttria-stabilized zirconia films with uniform thickness on silicon by the combination of PLD and RF sputtering

Pengfei Qu(Chinese Academy of Sciences), Zhanguo Wang(Chengdu University), Ju Wu(Chinese Academy of Sciences), Guangdi Zhou(Southern University of Science and Technology), Peng Jin(Chinese Academy of Sciences), Zhen Wang(Chinese Academy of Sciences)
Surface and Coatings Technology
January 25, 2023
10.1016/j.surfcoat.2023.129267
Cited by 9

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