Role of Diethylene Triaminepentaacetic Acid Pentapotassium Salt on Ruthenium CMP in H<sub>2</sub>O<sub>2</sub>-Based Slurries

Huiping Ma(Tianjin University of Technology), Guangyao Liu(University of California, Davis), Yue Zhang(Hebei University of Technology), Xinying Zhang(Tianjin University of Technology), Chenwei Wang(Harbin University of Science and Technology), Zihao Li(Wuhan University), Jianwei Zhou(Tianjin University of Technology)
ECS Journal of Solid State Science and Technology
November 30, 2022
10.1149/2162-8777/aca790
Cited by 9

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