Development of a High-Performance Microaccelerometer With Position Independent Pure-Axial Stressed Piezoresistive Beams

Mingzhi Yu, Zhuangde Jiang(Xi'an Jiaotong University), Yong Xia, Jia Chen, Libo Zhao(Yantai University), Xiangguang Han(Yantai University), Yun Zhang(Jishou University), Guangzhao Qin(Hunan University), Junjie Sun(Xi'an Jiaotong University), Ping Yang(Yantai University)
IEEE Transactions on Industrial Electronics
November 21, 2022
Cited by 13


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