Atomic-Level Sn Doping Effect in Ga2O3 Films Using Plasma-Enhanced Atomic Layer Deposition

Yi Shen(Fudan University), Qing‐Chun Zhang(Ningbo University), Jie Zhang(Fudan University), Jingtao Zhu(Fujian Medical University), Lin Gu(Tianjin University of Science and Technology), Wei Huang(Innovation Team (China)), Hong-Ping Ma(Ningbo University)
Nanomaterials
November 30, 2022
Cited by 35


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