Batch Nanofabrication of Suspended Single 1D Nanoheaters for Ultralow‐Power Metal Oxide Semiconductor‐Based Gas Sensors
Taejung Kim(Ulsan National Institute of Science and Technology), Heungjoo Shin(Government of the Republic of Korea), Jeong Min Baik(Sungkyunkwan University), Jae Joon Kim(Georgia Institute of Technology), Yeong Min Kwon(Ulsan National Institute of Science and Technology), Junyeong Yeom(Ulsan National Institute of Science and Technology), Beomsang Kim(Ulsan National Institute of Science and Technology), Wootaek Cho(Ulsan National Institute of Science and Technology)
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