Effects of sputtering pressure and oxygen partial pressure on amorphous Ga2O3 film-based solar-blind ultraviolet photodetectors

Keyun Gu(Shanghai University), Linjun Wang(Shanghai University), Meiyong Liao(National Institute for Materials Science), Zilong Zhang(National Institute for Materials Science), Jian Huang(Guilin University of Electronic Technology), Ke Tang(Shanghai University)
Applied Surface Science
September 8, 2022
Cited by 45


Related Papers