Design and Fabrication of Silicon-Blazed Gratings for Near-Infrared Scanning Grating MicromirrorSinong Zha(Chongqing University), Haomiao Zhang(Shaanxi Normal University)MicromachinesJune 25, 202210.3390/mi13071000Cited by 15SaveCiteExport RISWatch citationsRelated PapersScalable thin-layer membrane reactor for heterogeneous and homogeneous catalytic gas–liquid reactions|Green Chemistry|2018|29