On‐Chip Tailorability of Capacitive Gas Sensors Integrated with Metal–Organic Framework Films
Hongye Yuan(Xi'an Jiaotong University), Dan Zhao(Affiliated Hospital of Guizhou Medical University), Nanxi Li(Agency for Science, Technology and Research), Navab Singh(Agency for Science, Technology and Research), Avishek Karmakar(University of Pennsylvania), Chunhua Tang(National University of Singapore), Jifang Tao(Shandong University), Stephen J. Pennycook(Institute of Physics), Hong Cai(Institute of Microelectronics)
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