Heterodyne straightness interferometer with reduced periodic nonlinearities
Tao Jin(Zhejiang University), Bo Zhang(Nanjing University), Yanfen Le(University of Shanghai for Science and Technology), Wenmei Hou(University of Shanghai for Science and Technology), Lihua Lei(Shanghai Institute of Measurement and Testing Technology), Mengying Han(Harbin Medical University), Jinglin Liu(Sun Yat-sen Memorial Hospital)
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