Annealing effect on SiNx/SiO2 superlattice with ultrathin sublayer fabricated using plasma-enhanced atomic layer deposition

Hong-Ping Ma(Ningbo University), Qing‐Chun Zhang(Ningbo University), Yuhang Liu(Wuhan University), Jingtao Zhu(Fujian Medical University), Lin Gu(Tianjin University of Science and Technology), Wei Huang(Innovation Team (China)), Yi Shen(Fudan University)
Ceramics International
April 21, 2022
Cited by 9


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