Recent Advances in Theoretical Development of Thermal Atomic Layer Deposition: A Review
Mina Shahmohammadi(University of Illinois Chicago), Christos G. Takoudis(University of Illinois Chicago)
Cited by 54
Related Papers
Atomic layer deposition of TiO2, ZrO2 and TiO2/ZrO2 mixed oxide nanofilms on PMMA for enhanced biomaterial functionalization
|Applied Surface Science|2021|43