Estimation of Plasma Electron Density Inside the Radio Frequency Inductively Coupled Driver of Spider

Puneet Jain(Hospital for Sick Children), B. Zaniol(National Agency for New Technologies, Energy and Sustainable Economic Development), M. Recchia, E. Gaio, G. Serianni(University of Padua), A. Maistrello(National Agency for New Technologies, Energy and Sustainable Economic Development)
2020 IEEE International Conference on Plasma Science (ICOPS)
December 6, 2020
Cited by 1


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