Fabrication of the high-Q Si3N4 microresonators for soliton microcombs

Shuai Wan(University of Science and Technology of China), Chun‐Hua Dong(University of Science and Technology of China), Chang‐Ling Zou(Hefei University), Jinlan Peng(University of Science and Technology of China), Rui Niu(University of Science and Technology of China), Guang‐Can Guo(University of Science and Technology of China), Jin Li(Shenyang Medical College)
Chinese Optics Letters
January 1, 2022
Cited by 16


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