Silicon substrate-integrated hollow waveguide for miniaturized optical gas sensing
Shaonan Zheng(Nanyang Technological University), Lennon Y. T. Lee(Agency for Science, Technology and Research), Zhonghua Gu, Nanxi Li(Agency for Science, Technology and Research), Yao Zhang, Yanyan Zhou, Weiguo Chen, Qingxin Zhang(Shaanxi Normal University), Linfang Xu(Agency for Science, Technology and Research), Hong Cai(Institute of Microelectronics)
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