Effect of a seed layer on microstructure and electrical properties of Ga2O3 films on variously oriented Si substrates

Keyun Gu(Shanghai University), Linjun Wang(Shanghai University), Meiyong Liao(National Institute for Materials Science), Zilong Zhang(National Institute for Materials Science), Yi Shang(Shanghai University), Jian Huang(Guilin University of Electronic Technology), Ke Tang(Shanghai University), Yue Shen(Shanghai University)
Vacuum
October 13, 2021
Cited by 30


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