Design of Refractive/Diffractive Hybrid Projection Lens for DMD-Based Maskless Lithography

Zhuohui Xu(Xi’an Jiaotong-Liverpool University), Ziming Meng(Guangdong University of Technology), Jinyun Zhou(Guangdong University of Technology), Bo Wang(Guangdong University of Technology)
Optics
June 8, 2021
10.3390/opt2020011
Cited by 1

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