The effect of dislocation-related V-shaped pits preparation on the strain of AlN templates

Xingyu Zhou(Chinese Academy of Sciences), Hang Song(Shanghai Jiao Tong University), Yiren Chen(Chinese Academy of Sciences), Hong Jiang(Southwest Petroleum University), Guoqing Miao(Chinese Academy of Sciences), Zhiming Li(Shenzhen University), Zhiwei Zhang(Liaocheng University)
Thin Solid Films
April 23, 2021
Cited by 5


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