The Study of Defects Auto-Classification System in Semiconductor Manufacturing
Pengfei Wang(East China Normal University), Yuhang Zhao, Shoumian Chen(Shanghai Medical Information Center), Chen Li(Northeastern University), Xu Chen(Nanjing University), Zhengying Wei(Shanghai Huali Microelectronics (China)), Hao Fu, Zhounan Wang(Shanghai Huali Microelectronics (China))
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