Enhancing the dynamic range of deformable mirrors with compression bias

H. Cao(The University of Adelaide), S. Ng(The University of Adelaide), Minkyun Noh(Massachusetts Institute of Technology), A. F. Brooks(California Institute of Technology), F. Matichard(Massachusetts Institute of Technology), P. J. Veitch(The University of Adelaide)
Optics Express
November 27, 2020
Cited by 13Open Access
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Abstract

We report the design and testing of a compression-biased thermally-actuated deformable mirror that has a dynamic range larger than the limit imposed by pure-bending stress, negligible higher-order-mode scattering, and a linear defocus response and that is vacuum compatible. The optimum design principles for this class of actuator are described and a mirror with 370 mD dynamic range is demonstrated.


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