<scp>nanolithography toolbox</scp>—Simplifying the design complexity of microfluidic chips
Haoqing Zhang(Xi'an Jiaotong University), Pavel Neužil(Central European Institute of Technology), Xiaocheng Liu(Center for Life Sciences), Levent Yobaş(Hong Kong University of Science and Technology), Sheng Ni(Hong Kong University of Science and Technology), J Pekárek(Central European Institute of Technology), Jianguo Feng, Pavel Podešva(Northwestern Polytechnical University), Huanan Li(Hubei University), Hanliang Zhu(Northwestern Polytechnical University), Vojtěch Svatoš(Northwestern Polytechnical University), Imrich Gablech(Brno University of Technology)
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
November 1, 2020
Cited by 13
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