Investigation on the microstructural and mechanical properties of a Polytetrafluoroethylene thin film by radio frequency magnetron sputtering

Yueling Yu; Xinqi Xu; Congda Lu; Taihua Zhang; Yi Ma

doi:10.1016/j.tsf.2020.138302

Investigation on the microstructural and mechanical properties of a Polytetrafluoroethylene thin film by radio frequency magnetron sputtering

Yueling Yu(Zhejiang University of Technology), Xinqi Xu(Zhejiang University of Technology), Congda Lu(Zhejiang University of Technology), Taihua Zhang(Beihang University), Yi Ma(Zhejiang University of Technology)

Thin Solid Films

August 22, 2020

10.1016/j.tsf.2020.138302

Cited by 36

Abstract

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