Aerosol deposited BaTiO3 film based interdigital capacitor and squared spiral capacitor for humidity sensing application
Alok Kumar(Visvesvaraya National Institute of Technology), Nam‐Young Kim(Kwangwoon University), Bingfang Xie(Harbin Institute of Technology), Cong Wang(Harbin Institute of Technology), Fan‐Yi Meng(Guhua Hospital), Jun‐Ge Liang(Jiangnan University), Meng Zhao(Zhejiang University), Zhongliang Zhou(Harbin Institute of Technology)
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