Multi-layer lithography using focal plane changing for SU-8 microstructures

Qiming Chen, Yi-Ming Hu(University of Electronic Science and Technology of China), Jinyun Zhou(Guangdong University of Technology), Qi Zheng(Guangdong University of Technology)
Materials Research Express
June 1, 2020
10.1088/2053-1591/ab98cc
Cited by 11

Related Papers

Fano Resonance with Ultra-High Figure of Merits Based on Plasmonic Metal-Insulator-Metal Waveguide
|Plasmonics|2014|117
Extraction of Brain Tumor from MR Images Using One-Class Support Vector Machine
|Unknown|2005|114
Refractive index sensor based on multiple Fano resonances in a plasmonic MIM structure
|Applied Optics|2019|71
Single/Dual Fano Resonance Based on Plasmonic Metal-Dielectric-Metal Waveguide
|Plasmonics|2015|70
Toward Flexible and Wearable Embroidered Supercapacitors from Cobalt Phosphides-Decorated Conductive Fibers
|Nano-Micro Letters|2019|60