Development of two-color resonant ionization sputtered neutral mass spectrometry and microarea imaging for Sr
Yue Zhao(Muroran Institute of Technology), Ikuo Wakaida(Japan Atomic Energy Agency), Yukihiko Satou(Otsuka (Japan)), Takeru Yoshida(Otsuka (Japan)), Tetsuo Sakamoto(Kogakuin University), Ryohei Terabayashi(Otsuka (Japan)), Yuzuka Ohmori(Otsuka (Japan)), Hideki Tomita(Otsuka (Japan)), Volker Sonnenschein(Otsuka (Japan)), Masato Morita(Kogakuin University), Toshihide Kawai(Otsuka (Japan)), Kotaro Kato(Otsuka (Japan)), Masabumi Miyabe(Otsuka (Japan)), Takeo Okumura(Otsuka (Japan)), Yuta Miyashita(Otsuka (Japan))
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
May 27, 2020
Cited by 4
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