Improvement of ionization yield in sputtered neutral mass spectrometry using pulsed infrared and ultraviolet lasers

Reiko Saito(Toshiba (Japan)), Masaaki Fujii(Shanghai Institute for Science of Science), Jun Asakawa, Tetsuo Sakamoto(Kogakuin University), Kei Kiyokawa(Kogakuin University), Yue Zhao(Muroran Institute of Technology), Masato Morita(Kogakuin University), Haruko Akutsu
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
April 24, 2020
Cited by 3


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