Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications
Xuge Fan(Beijing Institute of Technology), Frank Niklaus(KTH Royal Institute of Technology), Anderson D. Smith(KTH Royal Institute of Technology), Mikael Östling(KTH Royal Institute of Technology), Fredrik Forsberg(KTH Royal Institute of Technology), Stephan Schröder(KTH Royal Institute of Technology), Sayedeh Shirin Afyouni Akbari(École Polytechnique Fédérale de Lausanne), Max C. Lemme(University of Siegen), Andreas Fischer(KTH Royal Institute of Technology), Stefan Wagner(University of Siegen), Luis Guillermo Villanueva(École Polytechnique Fédérale de Lausanne)
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