A review on piezoelectric ultrasonic motors for the past decade: Classification, operating principle, performance, and future work perspectives

Xinqi Tian(Harbin Institute of Technology), Yingxiang Liu(Harbin Institute of Technology), Jie Deng(Harbin Institute of Technology), Liang Wang(Harbin Institute of Technology), Weishan Chen(Harbin Institute of Technology)
Sensors and Actuators A Physical
March 19, 2020
Cited by 205

Abstract


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