Micro thermal conductivity detector based on SOI substrate with low detection limit

Bin Zhao(Northwestern Polytechnical University), Xinxin Li(North China Electric Power University), Zhengyin Yu(Chinese Academy of Sciences), Fei Feng(Chongqing University), Bowen Tian(Chinese Academy of Sciences)
Sensors and Actuators B Chemical
January 14, 2020
Cited by 13


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