Rapid Prototyping of a Dammann Grating in DMD-Based Maskless Lithography

Qi Zheng(Guangdong University of Technology), Yi-Ming Hu(University of Electronic Science and Technology of China), Jinyun Zhou(Guangdong University of Technology), Lei Liang(Dalian University of Foreign Languages), Qiming Chen, Kunhua Wen(Guangdong University of Technology)
IEEE photonics journal
October 29, 2019
10.1109/jphot.2019.2950281
Cited by 25

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