Minimal multi-target plasma sputtering tool
Kazunori Takahashi(Tohoku University), Shiro Hara(National Institute of Advanced Industrial Science and Technology), Yuki Yabuta, Ryuichiro Kamei, Akira Ando(Tohoku University), Taichi Saito(Tohoku University), Naoko Yamamoto(Disco (japan)), Hisashi Mizuguchi
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