Electron beam lithography on curved or tilted surfaces: Simulations and experiments

Kerim T. Arat(GenISys (Germany)), K. HAGEN(Delft University of Technology)
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
September 1, 2019
10.1116/1.5120632
Cited by 8

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