Undamaged Measurement of the Sub-Micron Diaphragm and Gap by Tri-Beam Interference
Yanping Chen(Nanjing Tech University), Yiping Wang(Tsinghua University), Zhongyuan Sun(Aston University), Changrui Liao(Shenzhen University), Chi Li(National Center for Nanoscience and Technology), Junxian Luo(Collaborative Innovation Center of Advanced Microstructures), Lin Zhang(Aston University), Shen Liu(Shenzhen University), Namita Sahoo(Aston University), Bin Du(Shenzhen University), Yuanyuan Zhao(Shenyang University of Technology)
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