On‐Chip Tailorability of Capacitive Gas Sensors Integrated with Metal–Organic Framework Films
Hongye Yuan(Xi'an Jiaotong University), Dan Zhao(Affiliated Hospital of Guizhou Medical University), Stephen J. Pennycook(Institute of Physics), Navab Singh(Agency for Science, Technology and Research), Chunhua Tang(National University of Singapore), Nanxi Li(Agency for Science, Technology and Research), Jifang Tao(Shandong University), Avishek Karmakar(University of Pennsylvania), Hong Cai(Institute of Microelectronics)
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