Single-crystal diamond microelectromechanical resonator integrated with a magneto-strictive galfenol film for magnetic sensing

Zilong Zhang(National Institute for Materials Science), Meiyong Liao(National Institute for Materials Science), Haihua Wu(National Institute for Materials Science), Masataka Imura(National Institute for Materials Science), Liwen Sang(National Institute for Materials Science), Yasuo Koide(National Institute for Materials Science), Linjun Wang(Shanghai University), Y. K. Takahashi(National Institute for Materials Science), Jian Huang(Guilin University of Electronic Technology), Satoshi Koizumi(National Institute for Materials Science)
Carbon
June 20, 2019
Cited by 40


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