Jones pupil metrology of lithographic projection lens and its optimal configuration in the presence of error sources
Zejiang Meng(Chinese Academy of Sciences), Yanjie Mao(Chinese Academy of Sciences), Sikun Li(Chinese Academy of Sciences), Jian Wang(Shanghai Micro Electronics Equipment (China)), Yang Bu(Chinese Academy of Sciences), Xiangzhao Wang(Beijing University of Technology), Chaoxing Yang(Chinese Academy of Sciences), Sheng Ni(Hong Kong University of Science and Technology)
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