Highly preferred orientation of Ga2O3 films sputtered on SiC substrates for deep UV photodetector application

Meng‐Qiu Li; Ni Yang; Gui‐Gen Wang; Huayu Zhang; Jiecai Han

doi:10.1016/j.apsusc.2018.12.045

Highly preferred orientation of Ga2O3 films sputtered on SiC substrates for deep UV photodetector application

Meng‐Qiu Li(Harbin Institute of Technology), Ni Yang(Harbin Institute of Technology), Gui‐Gen Wang(Harbin Institute of Technology), Huayu Zhang(Harbin Institute of Technology), Jiecai Han(Harbin Institute of Technology)

Applied Surface Science

December 6, 2018

10.1016/j.apsusc.2018.12.045

Cited by 102

Abstract

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