A Study on High Resolution Batch-Mode Micro-Utralsonic-Machining with Constant Feed Force of Sapphire for MEMS Application
Yanming Xia(Xiamen University), Yufeng Jin(Peking University), Xuanyanz Li(Xiamen University), Lu Song(University of South China), Wei Wang(Qinghai University), Jing Chen(Shanghai Jiao Tong University), Shenglin Ma(Xiamen University), Tao Wang(Qujing Normal University), Rongfeng Luo(Xiamen University)
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