Adsorption of Trace Phosphine in Circular Hydrogen of a Polysilicon Chemical Vapor Deposition Stove by Cu/γ-Al<sub>2</sub>O<sub>3</sub>

Yeming Zhou(Guizhou University), Guoqiang Huang(Tianjin University), Shuaifeng Liu(Tianjin University), Taifeng He(Tianjin University)
Industrial & Engineering Chemistry Research
October 16, 2018
Cited by 10


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