Low-Temperature NH3-Free Silicon Nitride Platforms for Integrated Photonics
Thalía Domínguez Bucio(University of Southampton), Frédéric Y. Gardes(University of Southampton), Shinichi Saito(University of Southampton), Kapil Debnath(University of Southampton), Moïse Sotto(University of Southampton), Mehdi Banakar(University of Southampton), Periklis Petropoulos(University of Southampton), Daniele Bajoni(University of Pavia), Marco Clementi(University of Pavia), Mattéo Galli(University of Pavia), Senta L. Scholl(University of Southampton), Ali Z. Khokhar(University of Southampton), Cosimo Lacava(University of Southampton), K. M. Grabska(University of Southampton), Stefan Ilie(University of Southampton)
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