Evaluation of lattice curvature and crystalline homogeneity for 2-inch GaN homo-epitaxial layer

Okkyun Seo(National Institute for Materials Science), Osami Sakata(Tokyo Institute of Technology), Satoshi Hiroi(National Institute for Materials Science), Yoshihiro Irokawa(National Institute for Materials Science), Yanna Chen(National Institute for Materials Science), Toshihide Nabatame(National Institute for Materials Science), Chulho Song(SPring-8), Yoshio Katsuya(National Institute for Materials Science), Yasuo Koide(Nagoya University), Jae Myung Kim(Pohang University of Science and Technology), Yanfang Lou(National Institute for Materials Science), L. S. R. Kumara(National Institute for Materials Science)
AIP Advances
July 1, 2018
Cited by 6


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