3D Volumetric Energy Deposition of Focused Helium Ion Beam Lithography: Visualization, Modeling, and Applications in Nanofabrication

Jingxuan Cai(University of Hong Kong), Wen‐Di Li(Institut de Recherche et d’Innovation), Sean P. Rodrigues(Georgia Institute of Technology), Zhouyang Zhu(Jiaxing University), Haixiong Ge(Nanjing University), Emile van Veldhoven(Netherlands Organisation for Applied Scientific Research), Paul F. A. Alkemade(Delft University of Technology), Qianjin Wang(Chinese University of Hong Kong), Wenshan Cai(Georgia Institute of Technology)
Advanced Materials Interfaces
April 19, 2018
Cited by 29


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