3D Volumetric Energy Deposition of Focused Helium Ion Beam Lithography: Visualization, Modeling, and Applications in Nanofabrication
Jingxuan Cai(Zhejiang University), Wen‐Di Li(Institut de Recherche et d’Innovation), Sean P. Rodrigues(Georgia Institute of Technology), Zhouyang Zhu(University of California, Berkeley), Haixiong Ge(Nanjing University), Emile van Veldhoven(Netherlands Organisation for Applied Scientific Research), Paul F. A. Alkemade(Delft University of Technology), Qianjin Wang(Chinese University of Hong Kong), Wenshan Cai(Georgia Institute of Technology)
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