The simple two-step polydimethylsiloxane transferring process for high aspect ratio microstructures

Shaoxi Wang(Northwestern Polytechnical University), Pouya Rezai(York University), Chenxia Hu(Huazhong University of Science and Technology), Dan Feng(Northwestern Polytechnical University)
Journal of Semiconductors
August 1, 2018
Cited by 6


Related Papers