Laser technologies in micro-optics. Part 1. Fabrication of diffractive optical elements and photomasks with amplitude transmission

Vadim P. Veiko(ITMO University), E. A. Shakhno(ITMO University), Dmitry A. Sinev(ITMO University), А. Г. Полещук(Russian Academy of Sciences), Victor P. Korolkov(Russian Academy of Sciences)
Optoelectronics Instrumentation and Data Processing
September 1, 2017
10.3103/s8756699017050077
Cited by 27

Related Papers

Laser-Assisted Microtechnology
|Springer series in materials science|1998|504
Ultrafast laser welding of transparent materials: from principles to applications
|International Journal of Extreme Manufacturing|2025|96
Controlled oxide films formation by nanosecond laser pulses for color marking
|Optics Express|2014|91
Reliable and well-controlled synthesis of noble metal nanoparticles by continuous wave laser ablation in different liquids for deposition of thin films with variable optical properties
|Journal of Nanoparticle Research|2016|79
Experimental and Theoretical Investigation of Periodic Nanostructuring of Au with Ultrashort UV Laser Pulses near the Damage Threshold
|Physical Review Applied|2015|76