Multiple-Patterning Nanosphere Lithography for Fabricating Periodic Three-Dimensional Hierarchical Nanostructures
Xiaobin Xu(California NanoSystems Institute), Paul S. Weiss(California NanoSystems Institute), Chuanzhen Zhao(Stanford University), Naihao Chiang(California NanoSystems Institute), Qing Yang(California NanoSystems Institute), Steven J. Jonas(Broad Center), Natcha Wattanatorn(California NanoSystems Institute)
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