Cobalt fill for advanced interconnects
Nikolaos Bekiaris(Applied Materials (United States)), Jianshe Tang(Applied Materials (United States)), Jonathan R. Bakke(Applied Materials (United States)), You Wang(Harbin Institute of Technology), Jin‐Hee Park(Applied Materials (United States)), Mark Lee(GlobalFoundries (Singapore)), Ren He(China Academy of Engineering Physics), Wenting Hou(Applied Materials (United States)), Tae Hong Ha(Applied Materials (United States)), Max Gage(Applied Materials (United States)), Mehul Naik(Applied Materials (United States)), Zhiyuan Wu(Applied Materials (United States))
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