Laser ablation of monocrystalline silicon under pulsed-frequency fiber laser

Vadim P. Veiko(ITMO University), Andrey A. Petrov(ITMO University), Huynh Cong Tu, A.M. Skvortsov(Saint - Petersburg State Chemical Pharmaceutical Academy)
Scientific and technical journal of information technologies mechanics and optics
May 15, 2015
10.17586/2226-1494-2015-15-3-426-434
Cited by 4

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