Development and analysis of nitrogen-doped amorphous InGaZnO thin film transistors

Haiting Xie(Shanghai Jiao Tong University), Jianeng Xu(Shanghai Jiao Tong University), Guochao Liu(Shanghai Jiao Tong University), Lei Zhang(Shanghai Jiao Tong University), Chengyuan Dong(Shanghai Jiao Tong University)
Materials Science in Semiconductor Processing
March 12, 2017
10.1016/j.mssp.2017.03.003
Cited by 42

Abstract

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