An Integrated Microfabricated Chip with Double Functions as an Ion Source and Air Pump Based on LIGA Technology

Hua Li(Guilin University of Technology), Zhencheng Chen(Guangxi University), Linxiu Jiang(Guilin University of Electronic Technology), Yongrong Jiang(Guilin University of Electronic Technology), Jianmin Zhu(Guilin University of Electronic Technology), Chaoqun Guo(Guilin University of Electronic Technology)
Sensors
January 4, 2017
Cited by 4


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