Size-dependent vibration of nickel cantilever microbeams: Experiment and gradient elasticity

Abstract

The size-dependent elasticity of a series of nickel cantilever microbeams was investigated experimentally for the first time. The experimental results revealed that the dimensionless natural frequencies of the cantilever microbeams increase to about 2.1 times with the beam thickness decreasing from 15 to 2.1 μm. Furthermore, based on the strain gradient elasticity theory (SGT) and by using the differential quadrature method (DQM) and the least square method (LSM), the experimental results were interpreted and the material length scale parameters in the scale of micron in elastic range were obtained. This investigation will be useful and helpful for the theoretical and numerical simulation of micro-structures and important for the design of the MEMS/NEMS.