In-Line Inspection on Thickness of Sputtered Thin Ta and TaN Films by Spectroscopic Ellipsometry

Chao Yuan, Yuhang Zhao(Zhejiang International Studies University), Qingyun Zuo(Shanghai Medical Information Center), Shaohai Zeng(Shanghai Medical Information Center), Xiaoxu Kang(Shanghai Medical Information Center), Shoumian Chen(Shanghai Medical Information Center)
ECS Transactions
March 16, 2012
Cited by 4


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