In-Line Inspection on Thickness of Sputtered Thin Ta and TaN Films by Spectroscopic Ellipsometry
Chao Yuan, Yuhang Zhao(Zhejiang International Studies University), Qingyun Zuo(Shanghai Medical Information Center), Shaohai Zeng(Shanghai Medical Information Center), Xiaoxu Kang(Shanghai Medical Information Center), Shoumian Chen(Shanghai Medical Information Center)
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